Prof. Bert Ellingboe
Albert R. Ellingboe, PhD. Has been Research Director of the Plasma Research Laboratory at Dublin City University since 2000. In this role he heads a group that develops the engineering-physics of plasma sources and their applications. Most recently the group has invented engineering systems that enable the application of scalable, high-VHF, capacitively coupled, plasma sources for large area applications including 450mm and LCD manufacturing.Prior to joining DCU, Dr. Ellingboe was Sr. Member of Engineering Staff at Lam Research Corp. where he was the key technologist in the development of the 300mm Exelan dielectric etch chamber including design and development of the rf-system, the plasma facing components, and the gas distribution and pumping. Prior to Lam Dr. Ellingboe help positions at AKT, Varian, and IBM, with responsibilities of R&D leading to tech transfer to manufacturing.Dr. Ellingboe received a BS degree in Applied Mathematics, Engineering, and Physics from the University of Wisconsin, Madison, in the USA, and a PhD in Plasma Physics from The Australian National University, Canberra, Australia.