Plasma Processing and Technology International Conference 2023

Speaker's Details

Prof. Ralf Peter Brinkmann

Ruhr-University Bochum, Germany

Ralf Peter Brinkmann was born in Braunschweig, Germany, on October 15, 1959. He received the degree in electrical engineering and the Ph.D. degree in physics (theoretical astrophysics) from Ruhr-University Bochum, Bochum, Germany, in 1986.,From 1987 to 1988, he was a Postdoc with the University of Chicago, Chicago, IL. From 1988 to 1990, he was a Research Associate Professor with the Old Dominion University, Norfolk, VA. From 1991 to 2000, he was with Siemens AG /Infineon Technologies AG, München, Germany. In 1993, he was with Stanford University, Stanford, CA, as a Visitor of Siemens AG, in 1993. Since 2000, he is a Professor in theoretical electrical engineering with Lehrstuhl für Theoretische Elektrotechnik, Ruhr-Universität Bochum.

The main focus of his research group is on the modelling and simulation of technological plasmas. A wide array of systems and devices is addressed, distinguished by their excitation scheme (DC, pulsed, RF, MW), pressure range (1 to 105 Pa), and electron density (1014 - 1020 m-3). Special emphasis is on RF driven discharges (capacitively and inductively coupled plasmas), miniaturized plasma jets at ambient pressure, and magnetically enhanced high power plasmas (high power impulse magnetrons, magnetically enhanced hollow cathode arc discharges). Also addressed are core phenomena such as the plasma boundary sheath and the onset of spontaneous structure formation. Moreover, evaluation schemes for the plasma diagnostic methods are developed, particularly for passive and active plasma resonance spectroscopy. The research uses both analytical and numerical models, often in combination.